A novel micromachined pump based on thick-film piezoelectric actuation

Thick-film Actuation Technologies for Mems Applications

⎯ This paper compares two thick-film actuation technologies and assesses their suitability for use within micromachined devices. The materials are a piezoelectric composition, which exhibits a d33 coefficient of the order of 130pC/N, and a magnetostrictive material which possess a magnetostriction of 4.4ppm at a magnetic field of 11.5kA/m. Examples of their application in micromachined devices ...

Energy Harvesting Technologies: Thick-Film Piezoelectric Microgenerator

Photoresist patterned thick-film piezoelectric elements on silicon

A fundamental limitation of screen printing is the achievable alignment accuracy and resolution. This paper presents details of a thick-resist process that improves both of these factors. The technique involves exposing/developing a thick resist to form the desired pattern and then filling the features with thick film material using a doctor blading process. Registration accuracy comparable wit...

Thick-film Piezoelectric Vibration Harvesting – A HUMS Application

A vibration energy scavenger, manufactured entirely by thick-film construction, has been developed to power autonomous subsystems in an embedded health and useage system. The device is constrained to a 2mm thickness and has been designed for a specific helicopter application. The resulting power output is capable of powering an ‘off-the-shelf’ microcontroller based system.

Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging

Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on silicon substrates, are a potential solution for integrated transducer arrays. This paper presents ...